JPH01139426U - - Google Patents
Info
- Publication number
- JPH01139426U JPH01139426U JP3602788U JP3602788U JPH01139426U JP H01139426 U JPH01139426 U JP H01139426U JP 3602788 U JP3602788 U JP 3602788U JP 3602788 U JP3602788 U JP 3602788U JP H01139426 U JPH01139426 U JP H01139426U
- Authority
- JP
- Japan
- Prior art keywords
- operating lever
- cantilever
- board
- wafer boat
- holds
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 claims description 4
- 238000004519 manufacturing process Methods 0.000 claims description 2
- 235000012431 wafers Nutrition 0.000 claims 3
- 239000000463 material Substances 0.000 claims 1
- 238000010438 heat treatment Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988036027U JPH0648835Y2 (ja) | 1988-03-18 | 1988-03-18 | 半導体製造装置用のカンチレバー |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988036027U JPH0648835Y2 (ja) | 1988-03-18 | 1988-03-18 | 半導体製造装置用のカンチレバー |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01139426U true JPH01139426U (en]) | 1989-09-22 |
| JPH0648835Y2 JPH0648835Y2 (ja) | 1994-12-12 |
Family
ID=31262647
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1988036027U Expired - Lifetime JPH0648835Y2 (ja) | 1988-03-18 | 1988-03-18 | 半導体製造装置用のカンチレバー |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0648835Y2 (en]) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010141100A (ja) * | 2008-12-11 | 2010-06-24 | Shin-Etsu Chemical Co Ltd | 拡散炉装置及び拡散方法 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59154017A (ja) * | 1983-02-22 | 1984-09-03 | Mitsubishi Electric Corp | 半導体ウエハの加熱炉用パドル |
-
1988
- 1988-03-18 JP JP1988036027U patent/JPH0648835Y2/ja not_active Expired - Lifetime
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59154017A (ja) * | 1983-02-22 | 1984-09-03 | Mitsubishi Electric Corp | 半導体ウエハの加熱炉用パドル |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010141100A (ja) * | 2008-12-11 | 2010-06-24 | Shin-Etsu Chemical Co Ltd | 拡散炉装置及び拡散方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0648835Y2 (ja) | 1994-12-12 |